LNF researchers change into protective suits before accessing the Michigan Lurie Nanofabrication Facility.
The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology. The facility also encourages researchers from non-traditional disciplines to make use of their processes, such as metal and dielectric coatings, vacuum processes, fabrication of micro and nano components and metrology tools.
Photo by Marcin Szczepanski/Lead Multimedia Storyteller, Michigan Engineering
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- Marcin Szczepanski
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- www.marcinvisuals.com